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Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure (Withdrawn 2003)
standard by ASTM International, 12/10/2002
ASTM F374-02
$65.00 Original price was: $65.00.$32.50Current price is: $32.50.