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ASTM F3166-16

Name: ASTM F3166-16 PDF - Lastest Technical Information
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ASTM F3166-16

Original price was: $48.00.Current price is: $24.00.

Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization
standard by ASTM International, 05/01/2016

Category: ASTM

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Description

Description

1.1 This specification details the generic criteria requirements of high pure titanium sputtering targets used as thin film material for through-silicon vias (TSV) metallization in advance packaging.