ASTM F3192-16

Original price was: $48.00.Current price is: $24.00.

Format: PDF      In Stock

 

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ASTM F3192-16

Original price was: $48.00.Current price is: $24.00.

Standard Specification for High-Purity Copper Sputtering Target Used for Through-Silicon Vias (TSV) Mettalization
standard by ASTM International, 09/01/2016

Format: PDF      In Stock

 

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Description

1.1 This specification details the generic criteria requirements of high pure copper sputtering targets used as thin film material for through-silicon vias (TSV) metallization in advanced packaging.

Product Details

Published:
09/01/2016
Number of Pages:
5
File Size:
1 file , 110 KB